Scheda prodotto non validato
I dati visualizzati non sono stati ancora sottoposti a validazione formale da parte dello Staff di IRIS, ma sono stati ugualmente trasmessi al Sito Docente Cineca (Loginmiur).
|Titolo:||Titanium nitride coatings obtained using new apparatus for ion-beam assisted deposition|
|Autori Unitn:||Bonelli, Marco|
|Anno di pubblicazione:||1991|
|Titolo del periodico:||SURFACE & COATINGS TECHNOLOGY|
|Abstract:||The advantage of the ion beam assisted deposition technique lies in the good control of process parameters such as film atomic composition, purity, density and adhesion, in addition to improved surface cleanliness of the substrate. A machine for combined ion implantation and physical vapour deposition (Joule effect and electron-gun) has recently been built at the Trento laboratories. It was designed with emphasis on easy and clean operation. To test the performance of the machine, with specific reference to the composition and structure of the coatings produced, we worked on a relatively well known system, titanium nitride, which was deposited with an electron gun in the presence of a nitrogen ion beam (characterized by an energy of 30 keV) and a nitrogen atmosphere. Samples of different stoichiometry were produced and characterized by scanning electron microscopy, X-ray diffraction and Auger electron spectroscopy. The results show, as expected, the important role played by the ion beam impinging on the sample.|
|Appare nelle tipologie:||03.1 Articolo su rivista (Journal article)|
File in questo prodotto:
- PubMed Central loading...
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione