CINECA IRIS Institutional Research Information System
IRIS è l'Anagrafe della ricerca dell'Università degli Studi di Trento, e ha lo scopo di raccogliere, documentare, conservare e diffondere, anche ad accesso aperto, la produzione scientifica degli autori afferenti all'Università degli Studi di Trento.
EnglishThe rate of oxide growth on Si, in dry atmosphere, shows two regimes: in the first (for thin oxide up to approximately 30 nm) the oxide is formed very quickly while in the second the rate decreases markedly as the thickness of the oxide layer increases. To describe the overall oxide growth we make use of Fick's second law but, at the same time, we allow for inhomogeneities and preferred diffusional pathways within the SiO2 as suggested, for example, by Revesz et al. in 1986 or, equivalently, for a possible ''granular network'' as envisaged by Duval et al. in 1990 and by Verdi and Miotello in 1992. To do this we introduce a depth-dependent diffusivity as is appropriate to a fractal geometry. This framework intrinsically explains the two experimentally observed regimes for oxide growth without empirically introducing a depth-dependent oxygen diffusivity as done in current literature. Finally we show how some reported features of radiation effects during oxide growth may help in a deeper understanding of the oxidation process itself.
Scheda prodotto non validato
I dati visualizzati non sono stati ancora sottoposti a validazione formale da parte dello Staff di IRIS, ma sono stati ugualmente trasmessi al Sito Docente Cineca (Loginmiur).
| Titolo: | Oxide-growth at a Si surface and role of radiation effects |
| Autori: | L., Verdi; Miotello, Antonio; R., Kelly |
| Autori Unitn: | |
| Titolo del periodico: | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS |
| Anno di pubblicazione: | 1994 |
| Numero e parte del fascicolo: | n. 1-4 |
| Codice identificativo Scopus: | 2-s2.0-0039250849 |
| Codice identificativo ISI: | WOS:A1994NR93500121 |
| Digital Object Identifier (DOI): | http://dx.doi.org/10.1016/0168-583X(94)96303-7 |
| Handle: | http://hdl.handle.net/11572/91719 |
| Appare nelle tipologie: | 03.1 Articolo su rivista (Journal article) |
File in questo prodotto:
http://hdl.handle.net/11572/91719
Copyright © 2021