Improvement in mechanical-properties by ion-implantation of sic films deposited on steel and copper

In this work we have implanted at various fluences silicon carbide (SiC) thin films deposited on AISI 316L stainless steel and oxygen-free high conductivity copper. It was observed that the improvements in the mechanical properties depend strongly on the ion fluence as well as on the ion species (Ar+, N+). High Ar+ fluence leads, by ion beam mixing, to the formation of a brittle Fe-Si interlayer which is deleterious with regard to the mechanical properties, as determined by scratch resistance tests. However, N+ implantation of SiC films can result in the formation of silicon carbonitrides and in particular the interface zone can be converted to iron-chromium nitrides. These composite multilayer structures on steel are suitable for obtaining surfaces with the optimum adhesion, friction and wear resistance properties.