In this work we have implanted at various fluences silicon carbide (SiC) thin films deposited on AISI 316L stainless steel and oxygen-free high conductivity copper. It was observed that the improvements in the mechanical properties depend strongly on the ion fluence as well as on the ion species (Ar+, N+). High Ar+ fluence leads, by ion beam mixing, to the formation of a brittle Fe-Si interlayer which is deleterious with regard to the mechanical properties, as determined by scratch resistance tests. However, N+ implantation of SiC films can result in the formation of silicon carbonitrides and in particular the interface zone can be converted to iron-chromium nitrides. These composite multilayer structures on steel are suitable for obtaining surfaces with the optimum adhesion, friction and wear resistance properties.