A Monte Carlo code is described, validated, and utilized to calculate the backscattering coefficient from surface layers of Pd deposited on bulk targets of Si. A quantitative evaluation of the backscattering coef- ficient as a function of the over-layer thickness is provided, as well as a comparison of the simulated results with experimental data concerning Pd thin films with known thicknesses.
Titolo: | Backscattered electrons from surface films deposited on bulk targets: A comparison between computational and experimental results | |
Autori: | Dapor, M.; Bazzanella, N.; Toniutti, L.; Miotello, Antonio; Gialanella, Stefano | |
Autori Unitn: | ||
Titolo del periodico: | NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS | |
Anno di pubblicazione: | 2011 | |
Codice identificativo WOS: | WOS:000292714400028 | |
Handle: | http://hdl.handle.net/11572/86921 | |
Appare nelle tipologie: | 03.1 Articolo su rivista (Journal article) |
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