A Monte Carlo code is described, validated, and utilized to calculate the backscattering coefficient from surface layers of Pd deposited on bulk targets of Si. A quantitative evaluation of the backscattering coef- ficient as a function of the over-layer thickness is provided, as well as a comparison of the simulated results with experimental data concerning Pd thin films with known thicknesses.

Backscattered electrons from surface films deposited on bulk targets: A comparison between computational and experimental results

Miotello, Antonio;Gialanella, Stefano
2011

Abstract

A Monte Carlo code is described, validated, and utilized to calculate the backscattering coefficient from surface layers of Pd deposited on bulk targets of Si. A quantitative evaluation of the backscattering coef- ficient as a function of the over-layer thickness is provided, as well as a comparison of the simulated results with experimental data concerning Pd thin films with known thicknesses.
Dapor, M.; Bazzanella, N.; Toniutti, L.; Miotello, Antonio; Gialanella, Stefano
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11572/86921
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