Backscattered electrons from surface films deposited on bulk targets: A comparison between computational and experimental results

Dapor, M.; Bazzanella, N.; Toniutti, L.; Miotello, Antonio; Gialanella, Stefano

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A Monte Carlo code is described, validated, and utilized to calculate the backscattering coefficient from surface layers of Pd deposited on bulk targets of Si. A quantitative evaluation of the backscattering coef- ficient as a function of the over-layer thickness is provided, as well as a comparison of the simulated results with experimental data concerning Pd thin films with known thicknesses.

Titolo:	Backscattered electrons from surface films deposited on bulk targets: A comparison between computational and experimental results
Autori Unitn:	Dapor, M. Bazzanella, N. Toniutti, L. Miotello, Antonio Gialanella, Stefano mostra contributor esterni nascondi contributor esterni
Anno di pubblicazione:	2011
Titolo del periodico:	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Citazione:	Backscattered electrons from surface films deposited on bulk targets: A comparison between computational and experimental results / Dapor, M.; Bazzanella, N.; Toniutti, L.; Miotello, A.; Gialanella, S.. - In: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION B, BEAM INTERACTIONS WITH MATERIALS AND ATOMS. - ISSN 0168-583X. - STAMPA. - 269(2011), pp. 1672-1674.
Abstract:	A Monte Carlo code is described, validated, and utilized to calculate the backscattering coefficient from surface layers of Pd deposited on bulk targets of Si. A quantitative evaluation of the backscattering coef- ficient as a function of the over-layer thickness is provided, as well as a comparison of the simulated results with experimental data concerning Pd thin films with known thicknesses.
Handle:	http://hdl.handle.net/11572/86921
Appare nelle tipologie:	03.1 Articolo su rivista (Journal article)

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