We report a nitrogen dioxide sensor suitable for environmental control, based on the change in conductivity of a single meso-porous silicon (PS) layer with about 80% porosity. We present the characterization of the sensor in the presence of low concentrations of NO2 in dry air and study the influence of humidity on sensor behaviour. The sensor shows a sensitivity to 12 ppb of NO2 in dry air and a good response to 50 ppb in humid air. © 2003 Elsevier Science B.V. All rights reserved.
Very sensitive porous silicon NO2 sensor
Pancheri, Lucio;Gaburro, Zeno;Soncini, Giovanni;Pavesi, Lorenzo
2003-01-01
Abstract
We report a nitrogen dioxide sensor suitable for environmental control, based on the change in conductivity of a single meso-porous silicon (PS) layer with about 80% porosity. We present the characterization of the sensor in the presence of low concentrations of NO2 in dry air and study the influence of humidity on sensor behaviour. The sensor shows a sensitivity to 12 ppb of NO2 in dry air and a good response to 50 ppb in humid air. © 2003 Elsevier Science B.V. All rights reserved.File in questo prodotto:
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