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EnglishPhase composition and microstructure of CoNiCrAlY thin films deposited by r.f. Magnetron Sputtering in reactive Ar/N2 atmosphere were determined by X-ray Diffraction. Three basic phases were observed, for increasing nitrogen partial pressure: (a) a nanocrystalline supersaturated solid solution of the alloy elements with fcc structure and interstitial nitrogen (up to 10–15%), with a sharp [111] fibre texture turning into a broad [200] component for increasing N2 content; (b) an amorphous phase with nominal composition M2N (with M as the alloy elements); and (c) a nanocrystalline nitride approaching the nominal composition MN. Nanocomposite coatings made of nanocrystalline fcc metal phase embedded in an amorphous matrix can be formed in a relatively narrow N2 partial pressure range, whereas at high nitrogen content the thin films tend to form an increasing fraction of a nanocrystalline nitride in addition to the amorphous matrix. Scratch test results are different for the various systems: thin films made of (a) behave as typical plastic metals, with an increased scratch test resistance for increasing N2 content; amorphous (b) films show a very good scratch test behaviour and tend to fail in a plastic mode, with optimal properties for systems made of fcc metal nanocrystalline/amorphous nanocomposites; thin films with a high N2 content tend to behave in a brittle way for increasing content of the nanocrystalline nitride phase.
| Titolo: | Co,Ni-base alloy thin films deposited by r.f. magnetron sputtering in Ar/N2 atmosphere | |
| Autori: | Leoni, Matteo; Tosi, Carlo; Scardi, Paolo | |
| Autori Unitn: | ||
| Titolo del periodico: | JOURNAL OF MATERIALS SCIENCE | |
| Anno di pubblicazione: | 2005 | |
| Numero e parte del fascicolo: | 7 | |
| Codice identificativo Scopus: | 2-s2.0-27544438207 | |
| Codice identificativo WOS: | WOS:000227956700017 | |
| Digital Object Identifier (DOI): | http://dx.doi.org/10.1007/s10853-005-0670-3 | |
| Handle: | http://hdl.handle.net/11572/71965 | |
| Appare nelle tipologie: | 03.1 Articolo su rivista (Journal article) |
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