CaO-stabilised zirconia thin films were deposited by r.f. magnetron sputtering (MS) on left angle bracket111right-pointing angle bracket Si substrates. The lack of epitaxial relationships between substrate and thin film, together with the competitive growth processes active during the low-temperature deposition, led to a nonhomogeneous microstructure. Transmission electron microscopy (TEM) pictures show the presence of two layers whose relative thickness depends on the deposition time: an interface layer made of small, equiaxial grains and a top layer made of larger columnar grains. X-ray diffraction (XRD) pole figures and θ/2θ—ψ maps point out the presence of a fibre texture with two axes, along [111] and tilted not, vert, similar14° to the [111] direction, attributed to interface and top layer, respectively. The integrated intensity of the (111) reflection of cubic Ca-stabilised zirconia (CaSZ) as a function of the ψ-tilt angle (obtained both from laboratory data and from synchrotron radiation data) was analysed by means of a model based on the different absorption effects of the two layers. Layer thickness values obtained by the modelling are in good agreement with TEM observation and are consistent with the assumed growth mechanism.

X-ray analysis of texture domains in nonhomogeneous thin films deposited by physical vapour deposition

Scardi, Paolo;Leoni, Matteo;D'Incau, Mirco
2004-01-01

Abstract

CaO-stabilised zirconia thin films were deposited by r.f. magnetron sputtering (MS) on left angle bracket111right-pointing angle bracket Si substrates. The lack of epitaxial relationships between substrate and thin film, together with the competitive growth processes active during the low-temperature deposition, led to a nonhomogeneous microstructure. Transmission electron microscopy (TEM) pictures show the presence of two layers whose relative thickness depends on the deposition time: an interface layer made of small, equiaxial grains and a top layer made of larger columnar grains. X-ray diffraction (XRD) pole figures and θ/2θ—ψ maps point out the presence of a fibre texture with two axes, along [111] and tilted not, vert, similar14° to the [111] direction, attributed to interface and top layer, respectively. The integrated intensity of the (111) reflection of cubic Ca-stabilised zirconia (CaSZ) as a function of the ψ-tilt angle (obtained both from laboratory data and from synchrotron radiation data) was analysed by means of a model based on the different absorption effects of the two layers. Layer thickness values obtained by the modelling are in good agreement with TEM observation and are consistent with the assumed growth mechanism.
1-2
Scardi, Paolo; Leoni, Matteo; D'Incau, Mirco
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11572/5477
Citazioni
  • ???jsp.display-item.citation.pmc??? ND
  • Scopus ND
  • ???jsp.display-item.citation.isi??? ND
social impact