In this Thesis, I will describe the study, development, fabrication and characterization of an integrated photonics platform based on CMOS compatible processes, with particular focus on silicon nitride (Si3N4) and silicon oxynitride (SiON) optical waveguides. This platform will be developed for the specific target of realizing a monolithically-integrated photonic quantum processor, composed by photon generation, manipulation, and detection stages all in a single chip. The research was financed by the European Commission under the Epiqus project. In addition, it will be shown that the same platform can be adapted for the application in different fields of optics integration. An example will be given about the realization of integrated high-performance band-stop optical filter for visible light. All the results presented in this Thesis were realize in collaboration between the Fondazione Bruno Kessler (FBK) research institute and the Department of Physics of the University of Trento. In particular, the fabrication processes of the photonic integrated circuits have been accomplished in the clean-room facilities of FBK. I would like to thanks all the people working there for their precious support.
Reconfigurable NIR Integrated Photonics for quantum application / Piccoli, Gioele. - (2024 Jul 24), pp. 1-170. [10.15168/11572_417210]
Reconfigurable NIR Integrated Photonics for quantum application
Piccoli, Gioele
2024-07-24
Abstract
In this Thesis, I will describe the study, development, fabrication and characterization of an integrated photonics platform based on CMOS compatible processes, with particular focus on silicon nitride (Si3N4) and silicon oxynitride (SiON) optical waveguides. This platform will be developed for the specific target of realizing a monolithically-integrated photonic quantum processor, composed by photon generation, manipulation, and detection stages all in a single chip. The research was financed by the European Commission under the Epiqus project. In addition, it will be shown that the same platform can be adapted for the application in different fields of optics integration. An example will be given about the realization of integrated high-performance band-stop optical filter for visible light. All the results presented in this Thesis were realize in collaboration between the Fondazione Bruno Kessler (FBK) research institute and the Department of Physics of the University of Trento. In particular, the fabrication processes of the photonic integrated circuits have been accomplished in the clean-room facilities of FBK. I would like to thanks all the people working there for their precious support.File | Dimensione | Formato | |
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phd_unitn_Piccoli_Gioele.pdf
embargo fino al 24/07/2026
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