Design and application of MEMS platforms for micromanipulation

The exploration of Microelectromechanical systems (MEMS) represents a crucial aspect in the advancement of modern science and technology. They offer low-cost solutions to miniaturize numerous devices. The increasing use of MEMS applications in biological research has created a pressing need for reliable micromanipulation tools. In this context, microgrippers have emerged as promising tools for the precise handling and characterization of biological samples. This thesis presents a novel biocompatible microgripper that utilizes electrothermal actuation integrated with a rotary capacitive position sensor. To overcome the limited displacement possibilities associated with electrothermal actuators, this microgripper incorporates conjugate surface flexure hinges (CSFH). These hinges enhance the desired tweezers output displacement. The designed microgripper can in principle manipulate biological samples ranging in size from 15 to 120 µm. Based on the sensitivity calculation of the rotary capacitive position sensors, the sensitivity of the displacement measurement is 102 fF/μm. By employing a kinematics modeling approach based on the pseudo-rigid-body method (PRBM), an equation for the displacement amplification factor is developed, and this equation is subsequently verified through FEM-based simulations. By comparing the amplification ratio value obtained from the analytical modeling and simulations, there is an excellent match, with a relative difference of only ~1%, thus demonstrating the effectiveness of the PRBM approach in modeling the kinematics of the structure under investigation. In addition to this, by using analytical modeling based on finite elements method (FEM), the design of the electrothermal actuator and the heat dissipation mechanism is optimized. FEM-based simulations are used to validate the theoretical modeling, demonstrating good agreement between the displacements derived from analytical modeling and simulations. The temperature difference (∆T) across a range from room temperature to 278℃ exhibits a relative difference of ~2.8%. Moreover, underpass technology is implemented to ensure that electrical signals or disturbances from other parts of the device, such as the electrothermal actuation system, do not interfere with the operation and integrity of the gripping mechanism. Ultimately, the microgripper is fabricated using conventional MEMS technology from a silicon-on-insulator (SOI) wafer through the deep reactive ion etching (DRIE) technique. The integration of theoretical modeling, simulations, and practical fabrication highlights a compelling approach that has the potential for transformative applications in the field of micromanipulation and biological sample handling. Furthermore, we propose a C-shaped structure with a curved beam mechanism to improve the movement provided by the thermal actuators. The design of experiment (DOE) method is used to optimize the geometrical parameters of our proposed device. Analytical modeling based on Castigliano's second theorem and finite element method (FEM) simulations are used to predict the behavior of the symmetrical C-shaped structure; the results are in good agreement. The MEMS-based rotational structures are fabricated on silicon-on-insulator (SOI) wafers using bulk micromachining and deep reactive ion etching (DRIE). The fabricated devices are tested; our findings reveal that our proposed MEMS rotational structure outperforms the symmetrical lancet structure by 28% in terms of delivered displacement. Furthermore, the experimental results agree well with those obtained through numerical analysis.