Results of an extensive R&D program aiming at radiation hard, small pitch, 3D pixel sensors are reported. The CMS experiment is supporting this R&D in the scope of the Inner Tracker upgrade for the High Luminosity phase of the CERN Large Hadron Collider (HL-LHC). In the HL-LHC the Inner Tracker will have to withstand an integrated fluence up to 2.3×1016neq∕cm2. A small number of 3D sensors were interconnected with the RD53A readout chip, which is the first prototype of 65 nm CMOS pixel readout chip designed for the HL-LHC pixel trackers. In this paper results obtained in beam tests before and after irradiation are reported. The irradiation of a single chip module was performed up to a maximum equivalent fluence of about 1×1016neq∕cm2. The analysis of the collected data shows excellent performance: the spatial resolution in not irradiated sensors can reach about 3 to 5 μm, for inclined tracks, depending on the pixel pitch. The measured hit detection efficiencies are close to 99% measured both before and after the above mentioned irradiation fluence.

Radiation resistant innovative 3D pixel sensors for the CMS upgrade at the High Luminosity LHC / Meschini, M.; Cassese, A.; Ceccarelli, R.; Viliani, L.; Dinardo, M.; Gennai, S.; Zuolo, D.; Messineo, A.; Parolia, S.; Ebrahimi, A.; Pitzl, D.; Steinbruck, G.; Dalla Betta, G. F.; Mendicino, R.; Alimonti, G.; Gemme, C.; Boscardin, M.; Ronchin, S.. - In: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION A, ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT. - ISSN 0168-9002. - STAMPA. - 978:(2020), pp. 164429.1-164429.5. [10.1016/j.nima.2020.164429]

Radiation resistant innovative 3D pixel sensors for the CMS upgrade at the High Luminosity LHC

Dalla Betta G. F.;Mendicino R.;Boscardin M.;Ronchin S.
2020-01-01

Abstract

Results of an extensive R&D program aiming at radiation hard, small pitch, 3D pixel sensors are reported. The CMS experiment is supporting this R&D in the scope of the Inner Tracker upgrade for the High Luminosity phase of the CERN Large Hadron Collider (HL-LHC). In the HL-LHC the Inner Tracker will have to withstand an integrated fluence up to 2.3×1016neq∕cm2. A small number of 3D sensors were interconnected with the RD53A readout chip, which is the first prototype of 65 nm CMOS pixel readout chip designed for the HL-LHC pixel trackers. In this paper results obtained in beam tests before and after irradiation are reported. The irradiation of a single chip module was performed up to a maximum equivalent fluence of about 1×1016neq∕cm2. The analysis of the collected data shows excellent performance: the spatial resolution in not irradiated sensors can reach about 3 to 5 μm, for inclined tracks, depending on the pixel pitch. The measured hit detection efficiencies are close to 99% measured both before and after the above mentioned irradiation fluence.
2020
Meschini, M.; Cassese, A.; Ceccarelli, R.; Viliani, L.; Dinardo, M.; Gennai, S.; Zuolo, D.; Messineo, A.; Parolia, S.; Ebrahimi, A.; Pitzl, D.; Steinbruck, G.; Dalla Betta, G. F.; Mendicino, R.; Alimonti, G.; Gemme, C.; Boscardin, M.; Ronchin, S.
Radiation resistant innovative 3D pixel sensors for the CMS upgrade at the High Luminosity LHC / Meschini, M.; Cassese, A.; Ceccarelli, R.; Viliani, L.; Dinardo, M.; Gennai, S.; Zuolo, D.; Messineo, A.; Parolia, S.; Ebrahimi, A.; Pitzl, D.; Steinbruck, G.; Dalla Betta, G. F.; Mendicino, R.; Alimonti, G.; Gemme, C.; Boscardin, M.; Ronchin, S.. - In: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION A, ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT. - ISSN 0168-9002. - STAMPA. - 978:(2020), pp. 164429.1-164429.5. [10.1016/j.nima.2020.164429]
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11572/293907
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