Thermal properties of dense polymer-derived SiCN(O) glasses

Amorphous silicon (oxy) carbonitride (SiCN(O)) are renowned for their advanced structural properties even at elevated temperatures. However, their thermal properties have been only marginally investigated to date. In this work, the thermal properties (thermal expansion coefficient, specific heat, thermal diffusivity and thermal conductivity) of two dense SiCN(O) glasses were assessed using thin polymer-derived SiCN(O) disks (thickness = x μm: 200 < x < 300). The thermal conductivity of SiCN(O) glasses appears strongly influenced by their composition and can be as low as 0.95 W m−1 K−1 at room temperature. © 2021 Elsevier B.V. All rights reserved.