On the use of neural networks to solve the reverse modelling problem for the quantification of dopant profiles extracted by scanning probe microscopy techniques / Ciappa, Mauro; Stangoni, Maria; Fichtner, Wolfgang; Ricci, Elisa; Scorzoni, Andrea. - In: MICROELECTRONICS RELIABILITY. - ISSN 0026-2714. - 44:9-11 SPEC. ISS.(2004), pp. 1703-1708. [10.1016/j.microrel.2004.07.058]
On the use of neural networks to solve the reverse modelling problem for the quantification of dopant profiles extracted by scanning probe microscopy techniques
Ricci, Elisa;
2004-01-01
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