Design and Analysis of RF - MEMS Switches with Meandered Beams for Reduced Actuation Voltage

This paper presents the design and the analysis of Single-Pole-Single-Throw (SPST) switches based on Micro- Electro-Mechanical-Systems technology for Radio Frequencies applications (RF-MEMS). The switches are of series ohmic type, and they are framed within a coplanar waveguide (CPW) configuration. The proposed switches are provided with meandershaped suspending beams, targeting a reduced actuation voltage and a design minimally subjected to nonidealities, such as deformations due to residual stress built within thin-films during the fabrication process. This design arrangement allowed the devices to demonstrate a simulated actuation voltage in the 4-8 V range, and an actuation time in the range of 10-20 μs. In terms of electrical features, the devices have been simulated up to 60 GHz, exhibiting a < -2 dB Insertion Loss up t o 3 7 GHz, and < -9 dB Return Loss along the whole range. The electro-mechanical properties of the switches have been investigated by means of Ansys Workbench, while its RF electrical performances have been assessed by Ansys HFSS.