This paper presents an unique low-temperature chemical vapor deposition process developed at Griffith University that enables the hetero-epitaxial growth of uniform single-crystalline cubic silicon carbide thin-film on very large silicon substrate. This technology, combined with the unique properties of silicon carbide, opens new opportunities for photonic applications on silicon.

Single-crystalline 3C-SiC thin-film on large Si substrate for photonic applications / Massoubre, D.; Wang, L.; Chai, J.; Walker, G.; Hold, L.; Lobino, M.; Dimitriev, S.; Iacopi, A.. - 2:(2014), pp. 416-419. (Intervento presentato al convegno Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational and Photonics - 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014 tenutosi a Washington, DC, usa nel 2014).

Single-crystalline 3C-SiC thin-film on large Si substrate for photonic applications

Lobino M.;
2014-01-01

Abstract

This paper presents an unique low-temperature chemical vapor deposition process developed at Griffith University that enables the hetero-epitaxial growth of uniform single-crystalline cubic silicon carbide thin-film on very large silicon substrate. This technology, combined with the unique properties of silicon carbide, opens new opportunities for photonic applications on silicon.
2014
Technical Proceedings of the 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014
Austin, TX, USA
Nano Science and Technology Institute
Massoubre, D.; Wang, L.; Chai, J.; Walker, G.; Hold, L.; Lobino, M.; Dimitriev, S.; Iacopi, A.
Single-crystalline 3C-SiC thin-film on large Si substrate for photonic applications / Massoubre, D.; Wang, L.; Chai, J.; Walker, G.; Hold, L.; Lobino, M.; Dimitriev, S.; Iacopi, A.. - 2:(2014), pp. 416-419. (Intervento presentato al convegno Nanotechnology 2014: MEMS, Fluidics, Bio Systems, Medical, Computational and Photonics - 2014 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2014 tenutosi a Washington, DC, usa nel 2014).
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11572/334552
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