Rutherford backscattering spectrometry (RBS) analysis of dichroic systems for optical applications

Abstract. The purpose of this study is the study of the physical parameters of a multilayer dichroic produced by PVD Magnetron Sputtering. The multilayers were designed by using a dedicated software and subsequently characterized by Rutherford Backscattering Spectrometry (RBS) in order to determine both the stoichiometry of the deposited oxides (SiO2 and TiO2) and the homogeneity of the film surface. RBS technique allowed to verify the variation of the deposited multilayer after annealing. AFM analysis was used to determine the roughness and thickness of the deposited layers, while some key parameters for optical behavior were obtained with a spectrophotometric analysis. These specific multilayers have been used in optical applications and particularly in the separation of the spectrum of the solar radiation systems for concentration photovoltaics (CPV).