Cuprous oxide thin films were produced on soda-lime glass substrates using reactive RF-magnetron sputtering. The influence of deposition parameters and temperature on composition and structural properties of the single layers was extensively studied using X-ray diffraction. The control over microstructure and residual stresses is possible by changing reactive gas pressure and deposition temperature. Fiber textured Cu2O films showing a [100] preferred orientation and a fraction of untextured domains can be obtained: suitable modeling taking this microstructure into account shows the presence of a strong compressive stress decreasing with the temperature. Highly reproducible films can be obtained, whose microstructure is preserved when sputtering on tungsten and zinc oxide substrates.

Structural properties of RF-magnetron sputtered Cu2O thin films

Azanza Ricardo, Cristy Leonor;D'Incau, Mirco;Leoni, Matteo;Malerba, Claudia;Scardi, Paolo
2011-01-01

Abstract

Cuprous oxide thin films were produced on soda-lime glass substrates using reactive RF-magnetron sputtering. The influence of deposition parameters and temperature on composition and structural properties of the single layers was extensively studied using X-ray diffraction. The control over microstructure and residual stresses is possible by changing reactive gas pressure and deposition temperature. Fiber textured Cu2O films showing a [100] preferred orientation and a fraction of untextured domains can be obtained: suitable modeling taking this microstructure into account shows the presence of a strong compressive stress decreasing with the temperature. Highly reproducible films can be obtained, whose microstructure is preserved when sputtering on tungsten and zinc oxide substrates.
2011
1
Azanza Ricardo, Cristy Leonor; D'Incau, Mirco; Leoni, Matteo; Malerba, Claudia; A., Mittiga; Scardi, Paolo
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11572/92894
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